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(408) 573-9000, info@ekksc.com
2025 Gateway Place, Suite 360 San Jose, CA 95110

O-Ring Products

EKKSC Offers Complete Range of Semiconductor Materials for Comparative Temperature and Chemical Resistance Levels.

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Superior® Perfluoroelastomer FFKM

  • 486 (White)
    Superior 486 is specifically designed to be a cost-effective, high-performance material for semiconductor applications. Superior 486 offers excellent plasma resistance and low particulation in a wide range of plasma environments. See EKKSC Material Matrix for more details.
  • 508 (White)
    Superior 508 is specifically designed for high temperature applications. Superior 508 offers excellent plasma resistance and minimum particulation in a wide range of plasma environments. See EKKSC Material Matrix for more details.
  • 495 (Black)
    Superior 495 is a cost-effective, high performance compound for applications in wet chemistries. Superior 495 offers excellent acid resistance and low extractables. See EKKSC Material Matrix for more details.
  • 498 (Black)
    Superior 498 is designed for high temperature wet chemistries/etch applications. Superior 498 offers excellent high temperature compression set resistance. See EKKSC Material Matrix for more details.
  • 485 (Black)
    Superior 485 is specifically designed to be a cost-effective, high-performance material for semiconductor applications. Superior 485 offers excellent plasma resistance and low particulation in a wide range of plasma environments. See EKKSC Material Matrix for more details.

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Superior® FKM  (proprietary/patented cure system)

  • F815 (Black Translucent)
    Superior F815 was specifically developed to be a cost-effective, high-performance compound for semiconductor applications. Superior F815 is an ultra-clean high Fluorine FKM with increased temperature resistance to 220° C, while offering outstanding plasma resistance and low particulation in a wide range of plasma environments.

Silicone VMQ

Fluorosilicone FVMQ

Hydrogenated Nitrile HNBR

Extreme FKM

Fluoroelastomer FKM

Range of Semiconductor Materials

Range_of_Semiconductor_Materials

RFN Treatment®

  • Sealing components made of elastomeric materials can have inherently high surface energies (tackiness) and a high coefficient of friction (COF). Whenever an elastomeric seal makes contact with the mating component, the interface of the two surfaces can produce a “stiction” effect. This can be detrimental when the contact is intermittent. Applications that require low stiction and long service life such as valve sealing components and diaphragms can greatly benefit from RFN treatment.

Seal Design Engineering Application Form

Please provide us with your application details so we can recommend the best solution:

  • Dry System

  • Wet System

  • Processing Area Environment (DI Water, Ozone, Piranha...)

  • Contact Information

  • This field is for validation purposes and should be left unchanged.

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