O-Ring Products

(408) 573-9000
2025 Gateway Place, Suite 360 San Jose, CA 95110

EKKSC Offers Complete Range of Semiconductor Materials for Comparative Temperature and Chemical Resistance Levels.

Superior® Perfluoroelastomer FFKM

486 (White)
Superior 486 is specifically designed to be a cost-effective, high-performance material for semiconductor applications. Superior 486 offers excellent plasma resistance and low particulation in a wide range of plasma environments. See EKKSC Material Matrix for more details.
495 (Black)
Superior 495 is a cost-effective, high performance compound for applications in wet chemistries. Superior 495 offers excellent acid resistance and low extractables. See EKKSC Material Matrix for more details.
485 (Black)
Superior 485 is specifically designed to be a cost-effective, high-performance material for semiconductor applications. Superior 485 offers excellent plasma resistance and low particulation in a wide range of plasma environments. See EKKSC Material Matrix for more details.
301F (Violet)
Superior® 301F was specifically developed as extremely clean unfilled perfluoroelastomer (FFKM) with excellent plasma resistance, minimal particulation and unrivaled compression set. This combination of properties allows Superior® 301F to be an excellent match for a wide range of CVD, Etch, metallization processes. It also has excellent chemical compatibility in a wide range of industrial applications.

Superior® FKM (proprietary/patented cure system)

F815 (Black Translucent)
Superior F815 was specifically developed to be a cost-effective, high-performance compound for semiconductor applications. Superior F815 is an ultra-clean high Fluorine FKM with increased temperature resistance to 220° C, while offering outstanding plasma resistance and low particulation in a wide range of plasma environments.

Silicone VMQ

Fluorosilicone FVMQ

Hydrogenated Nitrile HNBR

Extreme FKM

Fluoroelastomer FKM

Range of Semiconductor Materials

Range_of_Semiconductor_Materials

Sealing components made of elastomeric materials can have inherently high surface energies (tackiness) and a high coefficient of friction (COF). Whenever an elastomeric seal makes contact with the mating component, the interface of the two surfaces can produce a “stiction” effect. This can be detrimental when the contact is intermittent. Applications that require low stiction and long service life such as valve sealing components and diaphragms can greatly benefit from RFN treatment.

Seal Design Engineering Application Form

Please provide us with your application details so we can recommend the best solution: