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O-Ring Products
EEAI Semicon Division Offers Complete Range of Semiconductor Materials for Comparative Temperature and Chemical Resistance Levels.
Superior® Perfluoroelastomer FFKM
- 486 (White)
Superior 486 is specifically designed to be a cost-effective, high-performance material for semiconductor applications. Superior 486 offers excellent plasma resistance and low particulation in a wide range of plasma environments. See EEAI Semicon Division Material Matrix for more details. - 495 (Black)
Superior 495 is a cost-effective, high performance compound for applications in wet chemistries. Superior 495 offers excellent acid resistance and low extractables. See EEAI Semicon Division Material Matrix for more details. - 485 (Black)
Superior 485 is specifically designed to be a cost-effective, high-performance material for semiconductor applications. Superior 485 offers excellent plasma resistance and low particulation in a wide range of plasma environments. See EEAI Semicon Division Material Matrix for more details. - 301F (Violet)
Superior® 301F was specifically developed as extremely clean unfilled perfluoroelastomer (FFKM) with excellent plasma resistance, minimal particulation and unrivaled compression set. This combination of properties allows Superior® 301F to be an excellent match for a wide range of CVD, Etch, metallization processes. It also has excellent chemical compatibility in a wide range of industrial applications. - FC605 (Black)
Superior® FC605 is newly developed High Temperature resistant high-performance perfluoroelastomer (FFKM). Specifically designed for thermal processes with sealing locations up to 300°C and maximum excursion temperature to 340°C, while providing low outgassing and compression set. Superior® FC605 is an excellent match for Diffusion and Lamp Anneal along with excellent chemical compatibility in a wide range of industrial applications. - FC537 (White)
Superior® FC537 is newly developed high-performance white perfluoroelastomer (FFKM) providing low compression set and temperature resistant. Specifically designed for long term life, high plasma resistance and low outgassing in with a maximum excursion temperature up to 260°C. Superior® FC537 is an excellent match for Deposition, Metallization, Dry Etch and Asher and Lamp Anneal along with excellent chemical compatibility in a wide range of industrial applications.
Superior® FKM (proprietary/patented cure system)
- F815 (Black Translucent)
Superior F815 was specifically developed to be a cost-effective, high-performance compound for semiconductor applications. Superior F815 is an ultra-clean high Fluorine FKM with increased temperature resistance to 220° C, while offering outstanding plasma resistance and low particulation in a wide range of plasma environments. - F2815 (Black translucent)
Superior® F2815 was specifically developed as a cost-effective, high-performance compound for semiconductor application. Superior® F2815 is an ultra-clean unfilled FKM, which offers outstanding plasma resistance and low particulation in a wide range of plasma environments.
Silicone VMQ
Fluorosilicone FVMQ
Hydrogenated Nitrile HNBR
Extreme FKM
Fluoroelastomer FKM
Range of Semiconductor Materials
- Sealing components made of elastomeric materials can have inherently high surface energies (tackiness) and a high coefficient of friction (COF). Whenever an elastomeric seal makes contact with the mating component, the interface of the two surfaces can produce a “stiction” effect. This can be detrimental when the contact is intermittent. Applications that require low stiction and long service life such as valve sealing components and diaphragms can greatly benefit from RFN treatment.
- ePTFE Gasket Material (100% Expanded PTFE) is a versatile sealing material with comprehensive chemical compatibility (pH 0-14), wide temperature range capability (-268 to 260° C), non-stick and dielectric properties. It can seal liquids, while being permeable to air and gases with flexibility not capable using elastomers. ePTFE requires low compressive loads, but can withstand high compression.
- Teflon® PFA encapsulation of a Viton™ core provides excellent chemical resistance, a wide temperature range, and durability with low compression set. PFA Encapsulated Viton o-rings are used in various Semiconductor, Chemical Processing, and Industrial applications.
- The ESF® Line of products are specifically designed for Semiconductor Sub-fab applications. Our ESF® Subfab Solutions are designed to fit your specific needs using our Superior® line of industry leading elastomers. Anodization available in many colors to distinguish use locations.
Seal Design Engineering Application Form
Please provide us with your application details so we can recommend the best solution:
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